100nm silica nanoparticles (Polysciences Inc) were deposited on PMMA e-beam pattern array, as shown on Figure1. As you can see some holes on PMMA substrate are filled with 100nm spheres and some are unoccupied.
The close up on occupied site in 3D is shown on Figure2.
The example of measuring surface roughness on the top of particle sphere is shown Figure3. |